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Simulation model to control risk levels on process equipment through metrology in semiconductor manufacturing.
Alejandro Sendón
Stéphane Dauzère-Pérès
Jacques Pinaton
Published in:
WSC (2015)
Keyphrases
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simulation model
process control
semiconductor manufacturing
discrete event
control system
discrete event simulation
agent based simulation
control charts
simulation models
control method
mathematical model
dynamic systems
simulation environment
complex systems
simulation tool
dynamic programming
natural language