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Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range.
Liang Lou
Songsong Zhang
Woo-Tae Park
Lishiah Lim
Dim-Lee Kwong
Chengkuo Lee
Published in:
NEMS (2012)
Keyphrases
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multi layered
neural learning
sensor networks
time of flight
wide range
low cost
real time
sensor data
data acquisition
range data
charge coupled device
finite element analysis
multi sensor
human computer interaction
high speed
genetic algorithm
quasi static
sensor array
neural network