Integrated MEMS actuators for sub-Micron patterning on thin polymer films.

Emad Mehdizadeh Siavash Pourkamali

Published in: IECON (2014)

Keyphrases

control system
mathematical model
decision making
expert systems
low cost
grain size
real time
social networks
three dimensional
search algorithm
relational databases
degrees of freedom
integrated circuit
electron beam
integrating multiple
electron micrographs