Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System.
Qingyun YuLi LiHui ZhaoYing LiuKuo-Yi LinPublished in: Complex Syst. Model. Simul. (2021)
Keyphrases
- manufacturing systems
- correlation analysis
- manufacturing environment
- flexible manufacturing systems
- manufacturing processes
- regression analysis
- cluster analysis
- correlation coefficient
- quality control
- factor analysis
- spatial autocorrelation
- petri net
- shop floor
- holonic manufacturing systems
- control structure
- complex systems
- cooperative
- signal processing
- multi agent
- image processing
- data mining