Autonomous Scheduling in Semiconductor Back-End Manufacturing.
Jelle AdanAlp AkcayJohn FowlerMarc AlbersMichael GeurtsenPublished in: WSC (2022)
Keyphrases
- back end
- wafer fabrication
- semiconductor manufacturing
- user friendly
- data management
- building blocks
- version control
- manufacturing environment
- production line
- scheduling problem
- data types
- detailed design
- earth observing
- cooperative
- shop floor
- material handling
- scheduling algorithm
- production planning
- manufacturing systems
- robotic systems
- machine learning
- process control
- quality control
- data streams