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An extended Kalman filter for in situ sensing of yttria-stabilized zirconia in chemical vapor deposition.
Rentian Xiong
Paul J. Wissmann
Martha A. Gallivan
Published in:
Comput. Chem. Eng. (2006)
Keyphrases
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chemical vapor deposition
thin film
high density
sensor networks
real time
kalman filtering
wireless sensor networks
high speed
gathering information
neural network
database systems
multiscale
objective function
artificial neural networks
sensing devices