An IDEF0/Petri net approach to the system integration in semiconductor manufacturing systems.
Jin-Shyan LeePau-Lo HsuPublished in: SMC (2003)
Keyphrases
- manufacturing systems
- petri net
- petri net model
- manufacturing enterprises
- manufacturing environment
- shop floor
- manufacturing processes
- discrete event systems
- ims ld
- fuzzy petri net
- web service composition
- colored petri nets
- concurrent systems
- holonic manufacturing systems
- production cost
- service composition
- control structure
- manufacturing process
- manufacturing cell
- process model
- stochastic petri net
- knowledge acquisition
- assembly line