Silicon carbide capacitive pressure sensors with arrayed sensing membranes.
Bo MengWei TangXuhua PengHaixia ZhangPublished in: NEMS (2013)
Keyphrases
- sensor networks
- sensor fusion
- sensing devices
- data acquisition
- low cost sensors
- low cost
- micro controller
- selective perception
- real time
- high speed
- sensor data
- image sensor
- mobile sensor
- sensing modalities
- body sensor networks
- multi sensor
- wireless sensor networks
- gallium arsenide
- wearable sensors
- liquid crystal
- microscopy images
- physical objects
- dynamic range
- high density
- data fusion
- data streams
- cmos technology
- sensor technology
- high pressure
- physical world
- video camera
- steady state
- mobile robot