Statistical control of VLSI fabrication processes.

Purnendu K. Mozumder Andrzej J. Strojwas

Published in: Proc. IEEE (1990)

Keyphrases

high speed
control system
statistical analysis
data sets
high density
production processes
statistical inference
process model
statistical information
data acquisition
vlsi circuits
control theory
statistical significance
control method
data driven
expert systems
artificial intelligence
information retrieval