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A 0.4 µg Bias Instability and 1.2 µg Hz Noise Floor MEMS Silicon Oscillating Accelerometer With CMOS Readout Circuit.

Xi WangJian ZhaoYang ZhaoGuo Ming XiaAn Ping QiuYan SuYong Ping Xu
Published in: IEEE J. Solid State Circuits (2017)
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