Defect cluster recognition system for fabricated semiconductor wafers.
Melanie Po-Leen OoiHong Kuan SokYe Chow KuangSerge N. DemidenkoChris ChanPublished in: Eng. Appl. Artif. Intell. (2013)
Keyphrases
- semiconductor manufacturing
- electron beam
- semiconductor devices
- clustering algorithm
- high speed
- integrated circuit
- data clustering
- hierarchical clustering
- feature extraction
- recognition algorithm
- cluster analysis
- production system
- database
- x ray
- data points
- subspace clustering
- process control
- image sensor
- defect detection
- data mining
- real time