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Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators.
Felix Beyeler
Simon Muntwyler
Bradley J. Nelson
Published in:
CASE (2010)
Keyphrases
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real time
control system
higher level
semi automated
fully automated
data fusion
degrees of freedom
semiconductor manufacturing
sensor fusion
visual inspection
software testing
integrated circuit
multi sensor
computer aided
data acquisition
mathematical model
test set
data sets