COSAR: Commitment-Oriented "Sense and Respond" System for Microelectronic Manufacturing.

Jun-Jang Jeng Henry Chang Jen-Yao Chung

Published in: SAC (2003)

Keyphrases

manufacturing systems
quality control
thin film
manufacturing industry
real time
data sets
early vision
operations management
multiscale
expert systems
production process
manufacturing process
manufacturing processes
semiconductor manufacturing