GAN-OPC: mask optimization with lithography-guided generative adversarial nets.

Haoyu Yang Shuhe Li Yuzhe Ma Bei Yu Evangeline F. Y. Young

Published in: DAC (2018)

Keyphrases

global optimization
data mining
optimization algorithm
optimization problems
optimal design
optimization process
optimization method
unsupervised learning
generative model
data driven
website
computer vision
genetic algorithm
real time
object detection
digital images
multi agent
optimization methods
database