Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage.
Roel J. E. MerryMustafa UyanikRichard K. KoopsRené van de MolengraftMarijn van VeghelMaarten SteinbuchPublished in: ACC (2008)
Keyphrases
- modeling method
- robotic manipulator
- control method
- position control
- end effector
- control system
- optimal control
- degrees of freedom
- control scheme
- visual servoing
- robotic arm
- path planning
- force control
- robotic systems
- adaptive control
- process control
- automatic identification
- control problems
- control theory
- closed loop
- three dimensional
- force sensing