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Scanning thermal microscopy studies of local temperature distribution of micron-sized metallization lines.
Yuan Ji
Ziguo Li
Dong Wang
Yaohai Cheng
Dong Luo
Bin Zong
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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thermal imaging
high temperature
image analysis
thermal conductivity
heat transfer
room temperature
empirical studies
infrared
high resolution
random variables
uniformly distributed
air conditioning
air temperature
straight line
line drawings
power plant
spatial distribution
microscopy images
neural network