Fabrication Processes for Packaged Optical MEMS Devices.

Scott Samson Rahul Agarwal Sunny Kedia Weidong Wang Shinzo Onishi John Bumgarner

Published in: ICMENS (2005)

Keyphrases

electron beam
semiconductor devices
mobile devices
high end
database
data sets
three dimensional
software engineering
process model
high density
digital holography