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High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection
Jian Lu
Tsuyoshi Ikehara
Yi Zhang
Takashi Mihara
Toshihiro Itoh
Ryutaro Maeda
Published in:
CoRR (2008)
Keyphrases
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high quality
ground truth
data driven
control system
low cost
closed loop
high density
higher quality
pulse width
depth map
factor analysis