SiN used as a Stressor in Germanium-On-Insulator Substrate.

Sethavut Duangchan Keisuke Yamamoto Dong Wang Hiroshi Nakashima Akiyoshi Baba

Published in: 3DIC (2019)

Keyphrases

high impact
high temperature
magnetic recording
space charge
heat flow
steady state
database
artificial intelligence
video sequences
viewpoint
image analysis
wavelet transform
semiconductor devices
film thickness