Automatic clustering of wafer spatial signatures.
Wangyang ZhangXin LiSharad SaxenaAndrzej J. StrojwasRob A. RutenbarPublished in: DAC (2013)
Keyphrases
- spatial clustering
- clustering method
- clustering algorithm
- k means
- spatio temporal
- categorical data
- cluster analysis
- spatial and temporal
- information theoretic
- self organizing maps
- spatial information
- spatial data
- semi automatic
- data clustering
- spectral clustering
- fuzzy clustering
- integrated circuit
- neighborhood information
- data points
- similar objects
- spatial correlation
- data driven
- geographic information systems
- similarity function
- document clustering
- unsupervised learning
- fully automatic