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A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation.
Hsin-Ping Yen
Shiuan-Hau Huang
Yan-Hsiu Liu
Kuang-Hsien Tseng
Ji-Fu Kung
Yi-Ting Li
Yung-Chih Chen
Chun-Yao Wang
Published in:
ISQED (2023)
Keyphrases
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main contribution
simulation environment
software tools
analysis tool
data mining
simulation model
data sets
e learning
clustering algorithm
optimal solution
recommender systems
mathematical model
hierarchical clustering