Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems.
Gerolf KotteKlaus KabitzschPublished in: ECC (1999)
Keyphrases
- computer systems
- semiconductor manufacturing
- data processing
- hardware and software
- operating system
- computing systems
- information systems
- real time
- computer security
- computer technology
- communication systems
- discrete event simulation
- high end
- monitoring system
- process control
- information processing systems
- fault management
- model based diagnosis
- industrial systems
- computer networks
- critical care
- human beings
- fault diagnosis
- production system
- data acquisition
- cyber attacks
- state space
- expert systems
- metadata
- artificial intelligence
- real world
- data sets