Tapered SU8 waveguide for evanescent sensing by single-step fabrication.

Yu Xin Gregory Pandraud Anja van Langen-Suurling Paddy French

Published in: IEEE SENSORS (2017)

Keyphrases

single step
waveguide
multi step
finite element
high speed
high data rate
sensor networks
high density
integrated circuit
antenna array
data acquisition
real time
training data
electron beam
electro optic