Stitch-aware routing for multiple e-beam lithography.

Shao-Yun Fang Iou-Jen Liu Yao-Wen Chang

Published in: DAC (2013)

Keyphrases

neural network
artificial intelligence
image processing
real time
routing algorithm
electron beam
data sets
real world
knowledge base
three dimensional
peer to peer
network topology
routing problem
reinforced concrete