Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm.
Byungwhan KimSanghee KwonDonghwan KimPublished in: Expert Syst. Appl. (2010)
Keyphrases
- genetic algorithm
- optimization method
- real coded
- image analysis
- evolution strategy
- multi objective
- generalized regression neural network
- motion parallax
- optimization algorithm
- neural network
- constrained optimization
- genetic algorithm ga
- fitness function
- metaheuristic
- optimization problems
- evolutionary algorithm
- immune genetic algorithm
- artificial neural networks
- fuzzy logic
- simulated annealing
- optimization process
- high resolution
- global search
- multi population
- training set
- artificial intelligence
- scan data
- three dimensional
- electron beam
- evolutionary strategy
- penalty function
- ant colony optimization
- particle swarm optimization