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STM/AFM nano-oxidation process to room-temperature-operated single-electron transistor and other devices.
Kazuhiko Matsumoto
Published in:
Proc. IEEE (1997)
Keyphrases
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room temperature
carbon nanotubes
data sets
electron microscopy
neural network
information systems
design process
atomic force microscopy
mobile devices
high speed
mobile phone
development process
integrated circuit