Robustify ML-Based Lithography Hotspot Detectors.

Jingyu Pan Chen-Chia Chang Zhiyao Xie Jiang Hu Yiran Chen

Published in: ICCAD (2022)

Keyphrases

maximum likelihood
object detection
early warning
electron beam
negative selection algorithm
object detectors
feature detectors
data sets
databases
machine learning
information retrieval
genetic algorithm
social networks
feature space
x ray