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Novel techniques for dopant contrast analysis on real IC structures.

Joerg JatzkowskiMichél Simon-NajasekFrank Altmann
Published in: Microelectron. Reliab. (2012)
Keyphrases
  • database
  • data analysis
  • real time
  • data sets
  • real world
  • search engine
  • structural analysis
  • decision trees
  • cooperative
  • object recognition
  • real life
  • image analysis
  • quantitative analysis