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Epoxy-based permeable membrane fabrication for 3D microfluidic device.
Yoshikazu Hirai
Yusuke Nakai
Yoshihide Makino
Koji Sugano
Toshiyuki Tsuchiya
Osamu Tabata
Published in:
NEMS (2011)
Keyphrases
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semiconductor devices
high density
integrated circuit
silicon on insulator
data sets
neural network
user interface
artificial intelligence
knowledge base
image processing
high speed
electron beam