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A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance.
Youngju Kim
Hoyeop Lee
Chang Ouk Kim
Published in:
J. Intell. Manuf. (2023)
Keyphrases
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fault detection
mathematical model
industrial processes
management system
process model
experimental data
robust fault detection
neural network
simulation model
process control
fault detection and isolation