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Investigation of reliability of NO nitrided SiC(1100) MOS devices.
Takato Nakanuma
Asato Suzuki
Yu Iwakata
Takuma Kobayashi
Mitsuru Sometani
Mitsuo Okamoto
Takuji Hosoi
Takayoshi Shimura
Heiji Watanabe
Published in:
IRPS (2022)
Keyphrases
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