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Production and Application of High-Accuracy Polymer-Based Magnetically Driven Microtool.
Yoko Yamanishi
Shinya Sakuma
Fumihito Arai
Published in:
J. Robotics Mechatronics (2008)
Keyphrases
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high accuracy
data driven
databases
artificial intelligence
three dimensional
objective function
information technology
production system
key technologies
high efficiency
magnetic field
production scheduling
manufacturing processes
semiconductor manufacturing