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Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage.
B. G. Dijkstra
Okko H. Bosgra
Published in:
CDC (2002)
Keyphrases
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high precision
closed loop
design considerations
low order
high recall
open loop
control system
high order
higher order
feedback control
control law
control scheme
trajectory tracking
reinforcement learning
pid controller
parameter identification
iterative learning control