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Multiscale simulation of aluminum thin films for the design of highly-reliable MEMS devices.
Haruka Kubo
Mauro Ciappa
Takayuki Masunaga
Wolfgang Fichtner
Published in:
Microelectron. Reliab. (2009)
Keyphrases
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thin film
highly reliable
multiscale
simulation environment
design process
image processing
simulation model
multi layer
high density
artificial neural networks
room temperature
wavelet transform
low cost
short circuit
database
embedded systems
user interface
databases