Use of lithography simulation for the calibration of equation-based design rule checks.
David AbercrombieFedor PikusCosmin CazanPublished in: DAC (2009)
Keyphrases
- design process
- data sets
- database
- numerical solution
- building blocks
- design space
- camera calibration
- simulation model
- simulation tool
- design parameters
- simulation environment
- numerical methods
- design decisions
- engineering design
- computer aided
- human computer interaction
- knowledge based systems
- user interface
- multiscale