Improving Ge-rich GST ePCM reliability through BEOL engineering.
Andrea RedaelliAnna GandolfoG. SamanniE. GomieroE. PetroniLuca ScottiA. LippielloPaolo MattavelliJ. JasseD. CodegoniA. SerafiniRossella RanicaC. BoccaccioJ. SandriniR. BerthelonJ. C. GrenierOlivier WeberDavid TurgisA. ValeryS. Del MedicoV. CaubetJ. P. ReynardDidier DutartreL. FavennecA. ConteFabio DisegniM. De TomasiA. VentreM. BaldoDaniele IelminiAlfonso MaurelliP. FerreiraFranck ArnaudF. PiazzaPaolo CappellettiR. AnnunziataR. GonellaPublished in: ESSDERC (2021)