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A Homogenization Technique for the Boltzmann Equation for Low Pressure Chemical Vapor Deposition.
Christian A. Ringhofer
Matthias K. Gobbert
Published in:
SIAM J. Appl. Math. (2003)
Keyphrases
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chemical vapor deposition
thin film
high density
computer vision
high levels
low cost
active contours
theoretical analysis
numerical simulations
numerical methods