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A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam.
Yongqi Fu
Zhongwei Shen
Ngoi Kok Ann Bryan
Published in:
Microelectron. J. (2004)
Keyphrases
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high speed
coarse to fine
three dimensional
soft computing
artificial intelligence
data sets
neural network
data mining
image sequences
machine vision
geometric constraints
defect detection
reinforced concrete