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Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems.
Zhian Kuang
Liting Sun
Huijun Gao
Masayoshi Tomizuka
Published in:
CoRR (2021)
Keyphrases
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fractional order
feedback control
complex systems
optimal control
real time
integrated circuit
genetic algorithm
control system
simulated annealing
closed loop
control strategy
open loop