Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM.
Tathagata SrimaniA. C. YuRobert M. RadwayD. T. RichM. NelsonS. WongD. MurphyS. FullerGage HillsS. MitraMax M. ShulakerPublished in: VLSI Technology and Circuits (2023)