Wafer Defect Pattern Classification with Explainable-Decision Tree Technique.
Ken Chau-Cheung ChengKatherine Shu-Min LiSying-Jyan WangAndrew Yi-Ann HuangChen-Shiun LeeLeon Li-Yang ChenPeter Yi-Yu LiaoNova Cheng-Yen TsaiPublished in: ITC (2022)
Keyphrases
- pattern classification
- decision trees
- pattern classification problems
- feature extraction
- pattern recognition
- nearest neighbor rule
- semiconductor manufacturing
- random forest
- machine learning
- fuzzy classifier
- vowel recognition
- naive bayes
- decision tree algorithm
- probabilistic neural network
- mass spectrometry data
- decision boundary
- integrated circuit
- parzen window
- training set
- training data
- radial basis function neural network
- human identification
- linear dimensionality reduction
- ensemble methods