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Dielectric charging effects in floating electrode MEMS capacitive switches.

Loukas MichalasMatroni KoutsoureliE. PapandreouFlavio GiacomozziGeorge J. Papaioannou
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • information systems
  • database
  • multi agent
  • mobile robot
  • electric field
  • negative effects