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Cubic Spline Trajectory Planning and Vibration Suppression of Semiconductor Wafer Transfer Robot Arm.
Wisnu Aribowo
Kazuhiko Terashima
Published in:
Int. J. Autom. Technol. (2014)
Keyphrases
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robot arm
trajectory planning
motion planning
cubic spline
semiconductor manufacturing
degrees of freedom
curve fitting
mobile robot
path planning
obstacle avoidance
b spline
humanoid robot
multi robot
control law
neural network
dynamic environments
fuzzy sets
reinforcement learning