Computation of proximity effect corrections in electron beam lithography by a neural network.

Robert C. Frye Edward A. Rietman Kevin D. Cummings

Published in: IJCNN (1990)

Keyphrases

neural network
electron beam lithography
artificial neural networks
recurrent neural networks
pattern recognition
fuzzy logic
random walk
back propagation
multilayer perceptron
multi layer
auto associative
search space
knn
fault diagnosis
backpropagation neural network
image reconstruction from projections