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SF6 plasma etching and profile evolution of silicon in microplasma reactor.

Wang HaiLi HanZhou XuanWang ZhanWen Li
Published in: NEMS (2013)
Keyphrases
  • evolutionary algorithm
  • plasma etching
  • evolution process
  • thin film
  • low density
  • high density
  • user profiles
  • artificial neural networks
  • database
  • artificial intelligence
  • website
  • control system