On-Machine Optical Surface Profile Measuring System for Nano-Machining.
Hiroshi SawanoMotohiro TakahashiHayato YoshiokaHidenori ShinnoKimiyuki MitsuiPublished in: Int. J. Autom. Technol. (2011)
Keyphrases
- light scattering
- closely spaced
- white light
- three dimensional
- high speed
- white light interferometry
- surface points
- printed circuit boards
- surface reconstruction
- nano scale
- batch processing
- optical properties
- object surface
- surface roughness
- flowshop
- d objects
- free form
- surface model
- process planning
- vector field
- user profiles
- feed rate
- real time