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Three dimensional micro-mechanical and micro-optical devices fabricated by holographic two-photon lithography.

Liang YangJiawen LiJinli WangChenchu ZhangYanlei HuYahui SuWenhao HuangJiaru Chu
Published in: NEMS (2013)
Keyphrases
  • three dimensional
  • electron beam
  • x ray
  • digital holography
  • high speed
  • learning algorithm
  • object recognition
  • mobile devices
  • data sets
  • information systems
  • database systems
  • range data
  • surface reconstruction