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Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer.

Qifang HuChengchen GaoYilong HaoDacheng ZhangGuizhen YanYangxi Zhang
Published in: NEMS (2010)
Keyphrases
  • case study
  • design space
  • design parameters
  • neural network
  • design process
  • integrated circuit
  • high density