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Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer.
Qifang Hu
Chengchen Gao
Yilong Hao
Dacheng Zhang
Guizhen Yan
Yangxi Zhang
Published in:
NEMS (2010)
Keyphrases
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case study
design space
design parameters
neural network
design process
integrated circuit
high density