Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI.

K. R. Khiangte Amlta A. Laha S. Mahapatra U. Gangway

Published in: DRC (2018)

Keyphrases

low cost
chemical vapor deposition
thin film
film thickness
cost effective
low power
real time
digital camera
databases
solar cell
magnetic field
highly efficient
low complexity
data acquisition
embedded systems
single chip
multiscale