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Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application.

D. CroftG. SheddSantosh Devasia
Published in: ACC (2000)
Keyphrases
  • atomic force microscopy
  • learning algorithm
  • database
  • information retrieval
  • data sets
  • databases
  • decision making
  • mobile robot
  • power system